WebIn recent years etching techniques have proved fruitful in the study of polymers , especially of the semicry stalline thermoplastics. They range from 'metallographic-type' surface … WebThe pri- mary etchant gas in a typical over-etch step is HBr. In Fig. 11, the oxide thickness is shown as a function of % O 2 gas flow, in a mixture of HBrHeO 2 with 20% O 2 in HeO 2 …

Poly-Si - University of California, Berkeley

WebThe etch bias under this condition is about 1.2X. Similar conditions result in a 1.0X etch bias in a 4,000A layer. In both cases, the etch profile is at 70°. The polycrystalline silicon … WebEtching Basics (cont.) 20 nm of oxide! 8 0.16 This will etch all poly over the thin oxide, etch thru the 10nm of oxide, then start etching into the silicon substrate needless to say, this is … eagle ridge hospital volunteer

Anisotropic plasma etching of polysilicon - AVS: Science

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